
Associate Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates
Title : 仪器仪表学会传感器分会理事;中国仪器仪表学会微纳器件与系统技术分会理事;IEEE会员
Monolithic integrated CMOS thermal vacuum sensor
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Indexed by:Journal Article
Date of Publication:2008-01-01
Journal:半导体学报
Included Journals:ISTIC、PKU
Volume:29
Issue:6
Page Number:1103-1107
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