Associate Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates
Title : 仪器仪表学会传感器分会理事；中国仪器仪表学会微纳器件与系统技术分会理事；IEEE会员
Title of Paper:Preparation and Thermal Characterization of Diamond-Like Carbon Films
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Date of Publication:2009-07-01
Journal:CHINESE PHYSICS LETTERS
Included Journals:SCIE、ISTIC、Scopus
Volume:26
Issue:7
ISSN No.:0256-307X
Abstract:Diamond-like carbon (DLC) films are prepared on silicon substrates by microwave electron cyclotron resonance plasma enhanced chemical vapor deposition. Raman spectroscopy indicates that the films have an amorphous structure and typical characteristics. The topographies of the films are presented by AFM images. Effective thermal conductivities of the films are measured using a nanosecond pulsed photothermal reflectance method. The results show that thermal conductivity is dominated by the microstructure of the films.
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