Associate Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates
Title : 仪器仪表学会传感器分会理事；中国仪器仪表学会微纳器件与系统技术分会理事；IEEE会员
Title of Paper:Thermal conductivity measurement of submicron-thick aluminium oxide thin films by a transient thermo-reflectance technique
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Date of Publication:2008-02-01
Journal:CHINESE PHYSICS LETTERS
Included Journals:SCIE、ISTIC
Volume:25
Issue:2
Page Number:593-596
ISSN No.:0256-307X
Abstract:Thermal conductivity of submicron-thick aluminium oxide thin Elms prepared by middle frequency magnetron sputtering is measured using a transient thermo-reflectance technique. A three-layer model based on transmission line theory and the genetic algorithm optimization method are employed to obtain the thermal conductivity of thin films and the interfacial thermal resistance. The results show that the average thermal conductivity of 330-1000 nm aluminium oxide thin films is 3.3 Wm(-1)K(-1) at room temperature. No significant thickness dependence is found. The uncertainty of the measurement is less than 10%.
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