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Defect generation mechanism in magnetron sputtered metal films on PMMA substrates

Release Time:2022-10-06  Hits:

Date of Publication: 2022-10-06

Journal: JOURNAL OF MATERIALS SCIENCE MATERIALS IN ELECTRONICS

Institution: 机械工程学院

Volume: 30

Issue: 16

Page Number: 14847-14854

ISSN: 0957-4522

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