Fabrication of a three-layer SU-8 mould with inverted T-shaped cavities based on a sacrificial photoresist layer technique
Release Time:2022-10-06 Hits:
Date of Publication: 2022-10-02
Journal: BIOMEDICAL MICRODEVICES
Institution: 机械工程学院
Volume: 16
Issue: 5
Page Number: 655-660
ISSN: 1387-2176