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Fabrication of a three-layer SU-8 mould with inverted T-shaped cavities based on a sacrificial photoresist layer technique

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Date of Publication:2022-10-02

Journal:BIOMEDICAL MICRODEVICES

Affiliation of Author(s):机械工程学院

Volume:16

Issue:5

Page Number:655-660

ISSN No.:1387-2176

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