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一种基于聚酰亚胺的柔性静电驱动MEMS继电器的制造方法

Release Time:2022-10-19  Hits:

First Author: 刘军山

Disigner of the Invention: 舒振,赵欣悦,单晗,尹鹏和,张悦,杜立群,徐征

Institution: 机械工程学院

Application Number: ZL2018103 75861.6

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