Current position: Home >> Scientific Research >> Patents

一种基于聚酰亚胺的柔性静电驱动MEMS继电器的制造方法

Hits:

First Author:liujunshan

Disigner of the Invention:舒振,赵欣悦,单晗,yinpenghe,zhangyue,duliqun,xuzheng

Affilication of Author(s):机械工程学院

Application Number:ZL2018103 75861.6

Pre One:一种射流管伺服阀的微射流现场测量装置及方法

Next One:一种基于聚酰亚胺的柔性静电驱动MEMS继电器的制造方法
Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click : times
  • MOBILE Version
    •
    Open time:..
    The Last Update Time:..

    Mobile phone sweep