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论文类型：会议论文

发表时间：2011-07-15

收录刊物：EI、Scopus

页面范围：5906-5909

摘要：To solve the difficulty of machining ceramic micro-features, manufacturing methods based on green machining had been systematically researched using alumina. The research includes study of the formation law of machining gap while micro-machining was carried out in simple green ceramic, and effect of sintering on size of green ceramic micro-features. Through the processes of molding green ceramic, amending machining size, reserving machining gap, designing and preparing micro tool, and micro milling with planetary movement and sintering, twenty micro holes with diameter of 100  m and 200  m each and twenty-nine micro cavities with upper surface size of 500  m  500   m had been successfully machined, and the final size error was less than 2%. ? 2011 IEEE.