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纳米磨削诱导新型半导体薄膜表面纳米晶化材料去除机理的研究

Release Time:2016-08-09  Hits:

Leading Scientist: 张振宇

Institution: 机械工程学院

Project Source: 国家自然科学基金项目

Project Level: National level

Classification of Project: 国家自然科学基金

Status: 结题

Supported by: National Natural Science Foundation of China

Nature of Project: 纵向

Project Approval Number: 91123013

Date of Project Approval: 2011-09-25

Scheduled Completion Time: 2014-12-31

Date of Project Initiation: 2012-01-01

Date of Project Completion: 2014-12-31

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