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Indexed by:期刊论文

Date of Publication:2008-05-15

Journal:SURFACE & COATINGS TECHNOLOGY

Included Journals:SCIE、EI

Volume:202

Issue:16

Page Number:3897-3902

ISSN No.:0257-8972

Key Words:unbalanced magnetron sputtering; LaxCeyO1-x-y films; microstructure; tribological properties

Abstract:A series of LaxCeyO1-x-y films (x= 0-0.54, y= 0-0.58) with thickness of 35-45 nm was deposited by unbalanced magnetron sputtering. High-resolution transmission electron microscope observation shows that La0.24Ce0.34O0.42 film has polycrystalline structure. La2O3 and CeO2 are formed within the LaxCeyO1-x-y films confirmed by the X-ray diffraction and X-ray photoelectron microscopy The friction coefficient and residual compressive stress of five kinds of three-element compound films exhibit symmetric distribution with the relative equilibrium of La and Ce atomic concentration within the films. The critical load of all deposited films is between 28 and 33 mN. The friction coefficient of two kinds of rare earth complex oxide films is in the range of 0.08-0.09, which is lower than that of only one kind of rare earth oxide films, and the friction mechanism is discussed. (C) 2008 Elsevier B.V. All rights reserved.