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论文类型：期刊论文

发表时间：2009-05-12

发表刊物：JOURNAL OF ALLOYS AND COMPOUNDS

收录刊物：SCIE、EI

卷号：476

期号：1-2

页面范围：318-323

ISSN号：0925-8388

关键字：Nanoparticles; DLC; CeO2; La2O3; Optical properties

摘要：La2O3 and CeO2 doped composite hydrogen-free diamond-like carbon (DLC) films with thickness of 230-280 nm were deposited by unbalanced magnetron sputtering. Nanoparticles are formed on the surface of deposited films. Auger electron spectroscopy shows the C, O, La and Ce elements distribute uniformly along the depth direction, and they diffuse into the Si(1 0 0) substrate. X-ray photoelectron spectroscopy confirms the forming of La2O3 and CeO2 within the DLC films, and the amorphous DLC structure is not changed with the doping of rare earth oxides. G peak positions shift to higher wave numbers, and relative intensities ratio I-D/I-G increase of DLC films with the doping of La2O3 and CeO2, indicating the coherence between the I-D/I-G and G peak position. Furthermore, the photoluminescence (PL) obviously increase with the forming of nanoparticles and doping of La2O3 and CeO2. Specially, the PL intensity of 4% La2O3 and 4% CeO2 doped composite DLC films is 18.4 times of that of pure DLC films, which is beneficial for the increase of photoconversion efficiency of solar cells. (C) 2008 Elsevier B.V. All rights reserved.