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个人信息Personal Information
教授
博士生导师
硕士生导师
性别：男
毕业院校：天津大学
学位：博士
所在单位：机械工程学院
学科：机械制造及其自动化. 机械设计及理论
办公地点：机械工程学院知方楼5055
联系方式：zzy@dlut.edu.cn
电子邮箱：zzy@dlut.edu.cn
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Unusual stress behaviour of CeO2-doped diamond-like carbon nanofilms
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论文类型：期刊论文
发表时间：2008-02-01
发表刊物：PHILOSOPHICAL MAGAZINE LETTERS
收录刊物：SCIE、EI
卷号：88
期号：2
页面范围：145-151
ISSN号：0950-0839
摘要：CeO2-doped diamond-like carbon (DLC) films with thicknesses of 180-200 nm were deposited by unbalanced magnetron sputtering. When the CeO2 concentration is in the range 5-8%, the residual compressive stress of the deposited films is reduced by 90%, e.g. from about 4.1 GPa to 0.5 GPa, whereas their adhesion strength increases. These effects are attributed to the dissolution of CeO2 within the DLC amorphous matrix and a widening interface between the DLC film and the Si substrate, respectively.