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论文类型：期刊论文

发表时间：2007-12-01

发表刊物：CHINESE PHYSICS

收录刊物：SCIE、EI、Scopus

卷号：16

期号：12

页面范围：3790-3797

ISSN号：1009-1963

关键字：pulsed laser arc deposition; diamond-like carbon; tribological property; physical property

摘要：A novel method, pulsed laser arc deposition combining the advantages of pulsed laser deposition and cathode vacuum arc techniques, was used to deposit the diamond-like carbon (DLC) nanofilms with different thicknesses. Spectroscopic ellipsometer, Auger electron spectroscopy, x-ray photoelectron spectroscopy, Raman spectroscopy, atomic force microscopy, scanning electron microscopy and multi-functional friction and wear tester were employed to investigate the physical and tribological properties of the deposited films. The results show that the deposited films are amorphous and the sp(2), Sp(3) and C-O bonds at the top surface of the films are identified. The Raman peak intensity and surface roughness increase with increasing film thickness. Friction coefficients are about 0.1, 0.15, 0.18, when the film thicknesses are in the range of 17-21 nm, 30-57 nm, 67 123 nm, respectively. This is attributed to the united effects of substrate and surface roughness. The wear mechanism of DLC films is mainly abrasive wear when film thickness is in the range of 17 41 nm, while it transforms to abrasive and adhesive wear, when the film thickness lies between 72 and 123 nm.