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论文类型：期刊论文

发表时间：2007-11-01

发表刊物：DIAMOND AND RELATED MATERIALS

收录刊物：SCIE、EI、Scopus

卷号：16

期号：11

页面范围：1905-1911

ISSN号：0925-9635

关键字：unbalanced magnetron sputtering; DLC; rare earth; structure analysis

摘要：Twelve La2O3 doped diamond-like carbon (DLC) nanofilms were deposited using unbalanced dual-magnetron sputtering. AFM, XRD, Raman spectroscopy, AES, XPS, and TEM were employed to investigate the deposited films. The results show that the La2O3 is formed on the surface and in the inner of the DLC films. Raman spectra exhibit obvious amorphous DLC character. XRD spectra and HRTEM indicate the La2O3 doped DLC films are amorphous, and La2O3 is dissolved and distributed in the amorphous DLC matrix. While, when the La2O3 content attains to 10%, nanocrystalline grain with a diameter of about 2 nm is observed, and the Fourier transformation spectroscopy also displays the obvious cryatalline character. (c) 2007 Elsevier B.V All rights reserved.