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Indexed by:期刊论文

Date of Publication:2017-12-15

Journal:JOURNAL OF LIGHTWAVE TECHNOLOGY

Included Journals:SCIE、EI、Scopus

Volume:35

Issue:24

Page Number:5276-5279

ISSN No.:0733-8724

Key Words:Acoustic pressure detection; Fabry-Perot; fiber optics sensors

Abstract:We demonstrate a fiber-optic Fabry-Perot acoustic sensor based on a Parylene-C diaphragm of 500 nm in thickness. The excellent diaphragm forming ability and good adhesion of Parylene-C make the sensor fabricate up to 9 mm in diameter. Acoustic testing demonstrates a high dynamic pressure sensitivity of 2239 nm/Pa and a noise limited equivalent acoustic signal level of 22.1 mu Pa/Hz(1/2) at the frequency of 20 Hz. The frequency response exhibits an obvious peak at the frequency of 13 Hz. The sensor can be used for low-frequency acoustic pressure detections, which is necessary in surveillance and security systems.