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Effect of Nb Doping on Crystalline Orientation, Electric and Fatigue Properties of PZT Thin Films Prepared by Sol-Gel Process

Release Time:2019-03-11  Hits:

Indexed by: Journal Article

Date of Publication: 2017-12-01

Journal: JOURNAL OF CERAMIC SCIENCE AND TECHNOLOGY

Included Journals: EI、SCIE

Volume: 8

Issue: 4

Page Number: 519-524

ISSN: 2190-9385

Key Words: PNZT thin films; (100) preferred orientation; microstructure; fatigue resistance; sol-gel process

Abstract: Pb(NbxZr0.52Ti0.48)O-3 (PNZT) (x = 0 %, 1%, 2 %, 3%, 4 %, 5%) thin films were prepared in a sol-gel process to investigate the effects of Nb doping on the crystalline orientation, electric and fatigue properties of lead zirconate titanate (PZT) films. X-ray diffraction (XRD) and scanning electron microscope (SEM) analyses showed that PNZT films withNbdoping concentration below 5% exhibited a dense perovskite structure with (100) preferred orientation. The maximum dielectric constant was obtained in 4% Nb-doped PZT film with a precision impedance analyzer. Remnant polarization and fatigue resistance were enhanced significantly with 2% Nb dopant.

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