Determinations of Intermediate Neutral Species in Hydrocarbon Discharge Plasma

Release Time:2019-03-09  Hits:

Indexed by: Journal Article

Date of Publication: 2010-06-01

Journal: PLASMA CHEMISTRY AND PLASMA PROCESSING

Included Journals: EI、SCIE

Volume: 30

Issue: 3

Page Number: 349-361

ISSN: 0272-4324

Key Words: Pulsed benzene-discharge; F(2)-laser-ionization; Molecular beam; TOF mass spectrometer; Intermediate species

Abstract: This work reports laser ionization combined with Time-Of-Flight (TOF) mass spectrometry investigation on intermediate species in the hydrocarbon plasma of atmospheric-pressure fast-flow pulsed dc-discharge. All neutral intermediate species including transient radicals from benzene/Ar discharge have been characterized by a molecular beam sampling combined with TOF mass spectrometry. This shows that with a hydrocarbon gas mixture of 0.3% C(6)H(6) in Ar discharge the intermediate species consist of simple radicals (such as C(2), C(5)H(5), C(7)H(7)) and polycyclic organic molecules (C(10)H(8), C(13)H(10), C(14)H(10)). Theoretical studies on total energies and ionization potentials of the intermediate species have been carried out using the hybrid density functional theory. Effect of the ionization potential on mass spectral intensity has been discussed. Based on the observed data, the possible major neutral reaction channels of the plasma chemistry have been discussed. The developed experimental method has implications in volatile organic compounds removing and impurities diagnosis in Tokamak edge-plasma.

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