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Date of Publication:2022-10-06

Journal:纳米技术与精密工程

Issue:4

Page Number:361-364

ISSN No.:1672-6030

Abstract:In order to improve the effective area ratio and decrease packaging time, a micro direct methanol fuel cell (μ DMFC ) was packaged by ultraviolet (UV) curing technique. First, the current collectors with packaging holes were prepared based on non-silicon MEMS technology. Then the μDMFC was assembled and UV curing resin was injected into the packaging holes and the gap between the two current collectors. Finally, the assembly was exposed under UV light for30 s and the packaging was completed. Experimeuta] results show that this passive μDMFC with 3 mol/L methanol has a maximum power density of 2. 1 mW/cm2 and an internal ohmic resistance of 800 mΩ·cm2 at room temperature, which indicates that the UV curing technique is an effective method for the μDMFC packaging and may be feasible for packaging of other MEMS devices.

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