SiN插入层对GaN外延膜应力和光学质量的影响
Release Time:2022-06-27 Hits:
Date of Publication: 2013-01-01
Journal: 发光学报
Issue: 8
Page Number: 1017-1021
ISSN: 1000-7032
Release Time:2022-06-27 Hits:
Date of Publication: 2013-01-01
Journal: 发光学报
Issue: 8
Page Number: 1017-1021
ISSN: 1000-7032