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SiC衬底上制备紫外波段高反射AlGaN/GaN分布布拉格反射镜

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Date of Publication:2014-01-01

Journal:第13届全国MOCVD学术会议论文集中国有色金属学会

Affiliation of Author(s):光电工程与仪器科学学院

Page Number:79-79

Pre One:SiC衬底GaN LED生长及器件制备

Next One:SiN插入层对GaN外延膜应力和光学质量的影响
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