Current position: Home >> Scientific Research >> Patents

空穴导电特性氧化镓膜的制备方法及空穴导电特性氧化镓膜

Hits:

First Author:lianghongwei

Disigner of the Invention:xiaxiaochuan,liuyang,Shen Rensheng,duguotong,hulizhong

Application Number:CN201310414275.5

Authorization Date:2013-09-12

Authorization number:CN103469173A

Pre One:掺杂氧化镓膜的制备方法及掺杂氧化镓膜

Next One:一种用于高质量氧化物半导体材料制备的MOCVD加热盘