Current position: Home >> Scientific Research >> Patents

空穴导电特性氧化镓膜的制备方法及空穴导电特性氧化镓膜

Release Time:2021-01-05  Hits:

First Author: 梁红伟

Disigner of the Invention: 夏晓川,柳阳,申人升,杜国同,胡礼中

Application Number: CN201310414275.5

Authorization Date: 2013-09-12

Authorization Number: CN103469173A

Prev One:掺杂氧化镓膜的制备方法及掺杂氧化镓膜

Next One:一种用于高质量氧化物半导体材料制备的MOCVD加热盘