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Date of Publication:2022-10-02
Journal:Chinese Journal of Mechanical Engineering
Affiliation of Author(s):机械工程学院
Volume:24
Issue:3
Page Number:392-398
ISSN No.:1000-9345
Pre One:Error Analysis and Compensation of a Laser Measurement System for Simultaneously Measuring Five-Degree-of-Freedom Error Motions of Linear Stages
Next One:Development of a Compact Three-Degree-of-Freedom Laser Measurement System with Self-Wavelength Correction for Displacement Feedback of a Nanopositioning Stage
