Release Time:2024-10-13  Hits:

Date of Publication: 2024-06-24

Journal: 2024 10th International Conference on Mechatronics and Robotics Engineering, ICMRE 2024

Page Number: 220-227

Key Words: Angle error measurement; Angle errors; Angle measurement; Autocollimators; CNC machine; Computer control systems; Error measurements; Errors; Lens and mini autocollimator; Linear guideway; Mirror flatness or waviness; Roll-angle error; Semiconductor device manufacture; Spotlight diameter