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Date of Publication:2024-06-24

Journal:2024 10th International Conference on Mechatronics and Robotics Engineering, ICMRE 2024

Page Number:220-227

Key Words:Angle error measurement; Angle errors; Angle measurement; Autocollimators; CNC machine; Computer control systems; Error measurements; Errors; Lens and mini autocollimator; Linear guideway; Mirror flatness or waviness; Roll-angle error; Semiconductor device manufacture; Spotlight diameter