Development of a precision vertical planar stage as a programmable planar artefact
Release Time:2024-10-13 Hits:
Indexed by: Journal Papers
Document Code: 371233
Date of Publication: 2023-08-18
Journal: MEASUREMENT
Volume: 217
ISSN: 0263-2241
Key Words: 6-DEGREE-OF-FREEDOM MEASUREMENT SYSTEM; ACCURACY; CALIBRATION; COMPENSATION; ERROR MEASUREMENT SYSTEM; HIGH-RESOLUTION; LASER INTERFEROMETER; MODEL; PRODUCT