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纳米工艺下金属互连缺陷控制的VLSI可制造性设计方法研究

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Leading Scientist:CHEN XIAOMING

Supported by:国家自然科学基金项目

Sub-Class of Project:专项基金项目

Status:结题

Supported by:国家自然科学基金委员会

Nature of Project:纵向

Project Approval Number:61340050

Date of Project Approval:2013-09-25

Scheduled completion time:2014-12-31

Date of Project Initiation:2014-01-01

Date of Project Completion:2014-12-31

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