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New method of boron removal from silicon by electron beam injection

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Indexed by:期刊论文

Date of Publication:2014-01-01

Journal:Materials Science in Semiconductor Processing

Volume:18

Issue:2

Page Number:42-45

Pre One:采用原位反应法在石墨坩埚表面制备SiC涂层

Next One:Study of boron removal from molten silicon by slag refining under atmosphere
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