Fabrication of SU-8 moulds on glass substrates by using a common thin negative photoresist as an adhesive layer
点击次数:
发表时间:2022-10-02
发表刊物:JOURNAL OF MICROMECHANICS AND MICROENGINEERING
所属单位:机械工程学院
卷号:24
期号:3
ISSN号:0960-1317
点击次数:
发表时间:2022-10-02
发表刊物:JOURNAL OF MICROMECHANICS AND MICROENGINEERING
所属单位:机械工程学院
卷号:24
期号:3
ISSN号:0960-1317