3HHMZayIFcLh5l8XRL97oBg4jtIr7k8ZOkpkN7g1CQTcGZTw8xffKjpj9mz2
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A micro-milling vibration precision measurement system with laser micro-displacement sensor as measurement element

Release Time:2019-03-09  Hits:

First Author: Xiaohong Lu

Disigner of the Invention: 任宗金,俆广昊,路彦君,王鑫鑫,贾振元

Application Number: CN201310666502.3

Authorization Date: 2013-12-09

Authorization Number: CN103624633A

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