location: Current position: Home >> Scientific Research >> Paper Publications

Optimization of TiN/TiOxNy Laminated Electrode Films for High-Performance Gene Sequencing Chip

Hits:

Journal:JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Volume:171

Issue:4

ISSN No.:0013-4651

Key Words:MICRO-SUPERCAPACITORS; TITANIUM NITRIDE FILMS

Pre One:Effect of N2 flow rate on the crystallization and electrical performance of AlN films prepared by medium frequency magnetron sputtering

Next One:二氧化硅/环氧/苯并噁嗪三元共聚体系的制备:热学和力学性能