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Optimization of TiN/TiOxNy Laminated Electrode Films for High-Performance Gene Sequencing Chip

Release Time:2024-04-29  Hits:

Journal: JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Volume: 171

Issue: 4

ISSN: 0013-4651

Key Words: MICRO-SUPERCAPACITORS; TITANIUM NITRIDE FILMS

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