Effect of N-2 flow rate on the crystallization and electrical performance of AlN films prepared by medium frequency magnetron sputtering
Release Time:2024-04-29 Hits:
Indexed by: Journal Papers
Document Code: 372797
Date of Publication: 2023-09-30
Journal: THIN SOLID FILMS
Volume: 781
ISSN: 0040-6090
Key Words: DEPOSITION; TEMPERATURE; THIN-FILMS