Effect of Y2O3 interlayer on the electric properties of Y-doped HfO2 film deposited by chemical solution deposition
Release Time:2024-04-29 Hits:
Indexed by: Journal Papers
Document Code: 362052
Date of Publication: 2023-03-01
Journal: CERAMICS INTERNATIONAL
Volume: 49
Issue: 5
Page Number: 7670-7675
ISSN: 0272-8842
Key Words: FERROELECTRICITY; HAFNIUM OXIDE; LAYER; MICROSTRUCTURE; SURFACE; THICKNESS