Release Time:2024-04-29 Hits:
Indexed by: Journal Papers
Document Code: 387154
Date of Publication: 2023-12-18
Journal: Journal of Ceramics
Volume: 44
Issue: 6
Page Number: 1168 - 1175
ISSN: 2095-784X
Prev One:面向基因测序芯片应用的TiN电极薄膜制备及性能研究
Next One:Effect of Y2O3 interlayer on the electric properties of Y-doped HfO2 film deposited by chemical solution deposition