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[面向基因测序芯片应用的TiN电极薄膜制备及性能研究]

Release Time:2024-04-29  Hits:

Indexed by: Journal Papers

Document Code: 387211

Date of Publication: 2023-12-01

Journal: Cailiao Kexue yu Gongyi/Material Science and Technology

Volume: 31

Issue: 6

Page Number: 1 - 8

ISSN: 1005-0299

Key Words: electrochemical performance; fourth-generation DNA sequencing technology; gene sequencing; magnetron sputtering; TiN electrode film

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