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面向基因测序芯片应用的TiN电极薄膜制备及性能研究

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Date of Publication:2024-03-30

Journal:Material Science and Technology

Volume:31

Issue:6

Page Number:1-8

ISSN No.:1005-0299

Pre One:衬底偏压对反应磁控共溅射 Y∶HfO2薄膜电学性能的影响

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