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面向基因测序芯片应用的TiN电极薄膜制备及性能研究

Release Time:2024-04-29  Hits:

Indexed by: Journal Papers

Document Code: 387211

Date of Publication: 2023-01-01

Journal: 材料科学与工艺

Volume: 31

Issue: 6

Page Number: 1-8

ISSN: 1005-0299

Key Words: TiN电极薄膜; 基因测序; 电化学性能; 磁控溅射; 第四代DNA测序技术

CN: 23-1345/TB

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