Reliability of Al2O3-doped ZrO2 high-k dielectrics in three-dimensional stacked metal-insulator-metal capacitors
Release Time:2024-04-29 Hits:
Date of Publication: 2022-10-08
Journal: JOURNAL OF APPLIED PHYSICS
Institution: 材料科学与工程学院
Volume: 108
Issue: 12
ISSN: 0021-8979