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Reliability Comparison of ZrO2-Based DRAM High-k Dielectrics Under DC and AC Stress

Release Time:2024-04-29  Hits:

Date of Publication: 2022-10-08

Journal: IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY

Volume: 17

Issue: 2

Page Number: 324-330

ISSN: 1530-4388

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