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Reliability Comparison of ZrO2-Based DRAM High-k Dielectrics Under DC and AC Stress

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Date of Publication:2022-10-08

Journal:IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY

Volume:17

Issue:2

Page Number:324-330

ISSN No.:1530-4388

Pre One:Recent Progress on Energy-Related Applications of HfO2-Based Ferroelectric and Antiferroelectric Materials

Next One:Reliability of Al2O3-doped ZrO2 high-k dielectrics in three-dimensional stacked metal-insulator-metal capacitors
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