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Phase transformation and dielectric properties of Y doped HfO2 thin films

Release Time:2024-04-29  Hits:

Date of Publication: 2022-10-07

Journal: JOURNAL OF ALLOYS AND COMPOUNDS

Volume: 861

ISSN: 0925-8388

Key Words: "Y doped HfO2; Thin films; Phase transformation; Dielectric properties"

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