Conduction Mechanisms and Breakdown Characteristics of Al2O3-Doped ZrO2 High-k Dielectrics for Three-Dimensional Stacked Metal-Insulator-Metal Capacitors
Release Time:2024-04-29 Hits:
Date of Publication: 2022-10-05
Journal: IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY
Volume: 14
Issue: 1
Page Number: 154-160
ISSN: 1530-4388