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Conduction Mechanisms and Breakdown Characteristics of Al2O3-Doped ZrO2 High-k Dielectrics for Three-Dimensional Stacked Metal-Insulator-Metal Capacitors

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Date of Publication:2022-10-05

Journal:IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY

Volume:14

Issue:1

Page Number:154-160

ISSN No.:1530-4388

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