location： Current position: Home >> Scientific Research >> Paper Publications

Thickness-dependent phase evolution and dielectric property of Hf0.5Zr0.5O2 thin films prepared with aqueous precursor

Hits:

Date of Publication:2022-10-03

Journal:JOURNAL OF SOL GEL SCIENCE AND TECHNOLOGY

Volume:77

Issue:2

Page Number:430-436

ISSN No.:0928-0707

Pre One:Thickness dependent microstructural and electrical properties of TiN thin films prepared by DC reactive magnetron sputtering

Next One:TiN Thin Film Electrodes on Textured Silicon Substrates for Supercapacitors
Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click : times
  • MOBILE Version
    •
    Open time:..
    The Last Update Time:..

    Mobile phone sweep