Thickness-dependent phase evolution and dielectric property of Hf0.5Zr0.5O2 thin films prepared with aqueous precursor
Release Time:2024-04-29 Hits:
Date of Publication: 2022-10-03
Journal: JOURNAL OF SOL GEL SCIENCE AND TECHNOLOGY
Volume: 77
Issue: 2
Page Number: 430-436
ISSN: 0928-0707