Effect of the Hf content on the microstructure and ferroelectric properties of HfxZr1-xO2 thin films using an all-inorganic aqueous precursor solution
Release Time:2024-04-29 Hits:
Date of Publication: 2022-10-02
Journal: NANOSCALE
Volume: 13
Issue: 38
Page Number: 16216-16225
ISSN: 2040-3364