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Realization of ferroelectricity in sputtered Al 1-x Sc x N films with a wide range of Sc content

Release Time:2024-06-17  Hits:

Indexed by: Journal Papers

Document Code: 391524

Date of Publication: 2024-06-18

Journal: MATERIALS TODAY COMMUNICATIONS

Volume: 39

Key Words: RESIDUAL-STRESS; THIN-FILMS

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