Enhancement of ferroelectricity in chemical-solution-deposited ZrO2 thin films through fine phase transition control
Release Time:2024-06-17 Hits:
Date of Publication: 2024-05-18
Journal: Ceramics International
ISSN: 0272-8842
Key Words: Budget control; Chemical solution deposition; Chemical solutions; Deposition; Ferroelectricity; Ferroelectric property; Ferroelectrics materials; Ferroelectric thin films; Ferroelectric thin-films; Hafnium oxides; Low thermal budget; Natural abundance; Seed layer; Thin-films; Transition control; Zirconia