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Enhancement of ferroelectricity in chemical-solution-deposited ZrO2 thin films through fine phase transition control

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Date of Publication:2024-05-18

Journal:Ceramics International

ISSN No.:0272-8842

Key Words:Budget control; Chemical solution deposition; Chemical solutions; Deposition; Ferroelectricity; Ferroelectric property; Ferroelectrics materials; Ferroelectric thin films; Ferroelectric thin-films; Hafnium oxides; Low thermal budget; Natural abundance; Seed layer; Thin-films; Transition control; Zirconia

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