Effects of substrate bias voltage on conductivity and internal stress of TiN films
Release Time:2024-09-06 Hits:
Indexed by: Journal Papers
Document Code: 395227
Date of Publication: 2024-11-18
Journal: MATERIALS RESEARCH BULLETIN
Volume: 179
ISSN: 0025-5408
Key Words: CHEMISTRY; DEPOSITION; GROWTH; MORPHOLOGY; PERFORMANCE; TEXTURE; THIN-FILMS; TITANIUM NITRIDE FILMS