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Effect of abnormally oriented grains on the ferroelectric properties of Al0.65Sc0.35N thin films

Release Time:2024-11-27  Hits:

Indexed by: Journal Papers

Document Code: 412225

Date of Publication: 2024-12-23

Journal: MATERIALS TODAY COMMUNICATIONS

Volume: 41

Key Words: ALN; DEPOSITION; NANOSTRUCTURE; STRESS; SUBSTRATE

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