What you need to know for growth of AlScN Thin Film via Atomic Layer Deposition?
Release Time:2024-12-08 Hits:
Indexed by: Conference Paper
Document Code: 413093
Date of Publication: 2027-09-25
Journal: 2024 IEEE INTERNATIONAL CONFERENCE ON IC DESIGN AND TECHNOLOGY, ICICDT 2024
ISSN: 2381-3555