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Phase transition, leakage, dielectric permittivity and polarization switching of Al1-xScxN films in a wide Sc concentration range

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Date of Publication:2024-12-14

Journal:Ceramics International

ISSN No.:0272-8842

Key Words:Al<sub>1-x</sub>Sc<sub>x</sub>N films; Ferroelectric properties; Polarity; Sc-doping

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