Phase transition, leakage, dielectric permittivity and polarization switching of Al1-xScxN films in a wide Sc concentration range
Release Time:2024-12-15 Hits:
Indexed by: Journal Papers
Document Code: 471143
Date of Publication: 2025-02-02
Journal: CERAMICS INTERNATIONAL
Volume: 51
Issue: 4
Page Number: 5038-5044
ISSN: 0272-8842
Key Words: Al<sub>1-x</sub>Sc<sub>x</sub>N films; Ferroelectric properties; Polarity; Sc-doping