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Impacts of substrate materials on microstructure and electrochemical properties of Ti/TiN/TiON laminated films for gene sequencing chips

Release Time:2024-12-15  Hits:

Date of Publication: 2024-12-11

Journal: APPLIED MATERIALS TODAY

Volume: 41

ISSN: 2352-9407

Key Words: ELECTRODES; MICRO-SUPERCAPACITORS; PERFORMANCE

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