location: Current position: Home >> Scientific Research >> Paper Publications

Impacts of substrate materials on microstructure and electrochemical properties of Ti/TiN/TiON laminated films for gene sequencing chips

Hits:

Date of Publication:2024-12-11

Journal:APPLIED MATERIALS TODAY

Volume:41

ISSN No.:2352-9407

Key Words:ELECTRODES; MICRO-SUPERCAPACITORS; PERFORMANCE

Next One:Phase transition, leakage, dielectric permittivity and polarization switching of Al1-xScxN films in a wide Sc concentration range