Long-term stability of electrical and electrochemical properties of TiN film in the atmosphere environment
Release Time:2026-03-17 Hits:
Indexed by: Journal Papers
Document Code: 472055
Date of Publication: 2025-03-15
Journal: SURFACES AND INTERFACES
Volume: 61
ISSN: 2468-0230
Key Words: DENSITY; DEPOSITION; OXIDATION; PERFORMANCE; TITANIUM NITRIDE