Release Time:2026-03-17  Hits:

Indexed by: Journal Papers

Document Code: 413396

Date of Publication: 2024-10-25

Journal: 功能材料与器件学报

Volume: 30

Issue: 05

Page Number: 239-246

ISSN: 1007-4252

Key Words: AlScN ferroelectric film; c-axis orientation; high Sc content

CN: 31-1708/TB