工作气压对AlScN薄膜结构和电学性能的影响
Release Time:2026-06-26 Hits:
Indexed by: Journal Papers
Document Code: 600886
Date of Publication: 2025-11-12
Journal: 无机材料学报
Volume: 41
Issue: 04
Page Number: 486-492
ISSN: 1000-324X
Key Words: AlScN film; ferroelectric property; micro structure; working pressure
CN: 31-1363/TQ