工作气压对AlScN薄膜结构和电学性能的影响
Release Time:2026-03-17 Hits:
Indexed by: Journal Papers
Document Code: 592862
Date of Publication: 2025-01-01
Journal: 无机材料学报
Page Number: 1-8
ISSN: 1000-324X
Key Words: AlScN films; ferroelectric properties; micro-structure; working pressure
CN: 31-1363/TQ