Impact of bottom electrode materials on the crystallographic orientation and ferroelectric performance of Al0.8Sc0.2N thin films
Release Time:2026-03-17 Hits:
Indexed by: Journal Papers
Document Code: 591117
Date of Publication: 2025-12-11
Journal: NANOSCALE
Volume: 17
Issue: 48
Page Number: 28176-28184
ISSN: 2040-3364